Modeling of a scalable coupled resonator array for microshutter applications

• In this paper we present the resultsfrom the finite element analysis of a scalablecoupled resonator array for ultrafast microshutterapplications. This new design concept builds on thedesign of a previous microshutter array, but couplesthe shutters to each other to allow them to move in acoupled antiphase resonance mode. Simulations forarray scalability show that the resonance frequencydoes not change significantly when adding rowsor columns to the array. The desired resonancemode stays present during scaling. Analyzingthe sensitivity to changing dimensions results inslightly different amplitudes but no change inphase difference between adjacent shutters at theresonance frequency.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Annan teknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies (hsv//eng)

NATURVETENSKAP  -- Fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

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