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- Tomi, M.Aalto-Yliopisto,Aalto University (author)
Buckled diamond-like carbon nanomechanical resonators
- Article/chapterEnglish2015
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- 2015
- Royal Society of Chemistry (RSC),2015
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- LIBRIS-ID:oai:research.chalmers.se:74593807-f79b-45e2-a8bd-fceb2064caf9
- https://doi.org/10.1039/c5nr02820eDOI
- https://research.chalmers.se/publication/222750URI
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- Language:English
- Summary in:English
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- We have developed capacitively-transduced nanomechanical resonators using sp(2)-rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a temperature of 500 degrees C. Characterizing the resonant response, we find a larger than expected frequency tuning that we attribute to the membrane being buckled upwards, away from the bottom electrode. The possibility of using buckled resonators to increase frequency tuning can be of advantage in rf applications such as tunable GHz filters and voltage-controlled oscillators.
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- Isacsson, Andreas,1975Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)isac (author)
- Oksanen, M.Aalto-Yliopisto,Aalto University (author)
- Lyashenko, D.Aalto-Yliopisto,Aalto University (author)
- Kaikkonen, J. P.Aalto-Yliopisto,Aalto University (author)
- Tervakangas, S. (author)
- Kolehmainen, J. (author)
- Hakonen, PAalto-Yliopisto,Aalto University (author)
- Aalto-YliopistoChalmers tekniska högskola (creator_code:org_t)
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- In:Nanoscale: Royal Society of Chemistry (RSC)7:35, s. 14747-147512040-33722040-3364
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