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Fabrication of larg...
Fabrication of large dimension aluminum air-bridges for superconducting quantum circuits
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- Abuwasib, Mohammad, 1982 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Krantz, Philip, 1984 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Delsing, Per, 1959 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- American Vacuum Society, 2013
- 2013
- Engelska.
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Ingår i: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. - : American Vacuum Society. - 2166-2746 .- 2166-2754. ; 31:3, s. 031601-
- Relaterad länk:
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http://dx.doi.org/10...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Proper grounding between different ground planes in coplanar superconducting qubit circuits is important to avoid spurious resonances which increase decoherence. Here, the authors present a possible solution to suppress such undesired modes using superconducting aluminum air-bridges which have been fabricated on top of aluminum coplanar waveguide transmission lines. 3D electromagnetic simulations were done to guide the design of the air-bridges such that the input reflection (S11) of the bridges was kept at a minimum level. A fabrication method based on optical lithography techniques was developed and it resulted in air-bridges with a height of approximately 10 μm and lengths of up to 500 μm. The method can be generalized to arbitrary length air-bridge with heights even exceeding 15 μm.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
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