Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution

Engelsen, Nils Johan,1987Chalmers tekniska högskola,Chalmers University of Technology (author)

Mechanical resonators are widely used in sensors, transducers and optomechanical systems, where mechanical dissipation sets the ultimate limit to performance. Over the past 15 years, the quality factors in strained mechanical resonators have increased by four orders of magnitude, surpassing the previous state of the art achieved in bulk crystalline resonators at room temperature and liquid helium temperatures. In this Review, we describe how these advances were made by leveraging ‘dissipation dilution’—where dissipation is reduced through a combination of static tensile strain and geometric nonlinearity in dynamic strain. We then review the state of the art in strained nanomechanical resonators and discuss the potential for even higher quality factors in crystalline materials. Finally, we detail current and future applications of dissipation-diluted mechanical resonators.

Beccari, AlbertoEcole Polytechnique Federale de Lausanne (EPFL),Swiss Federal Institute of Technology in Lausanne (EPFL) (author)
Kippenberg, Tobias J.Ecole Polytechnique Federale de Lausanne (EPFL),Swiss Federal Institute of Technology in Lausanne (EPFL) (author)
Chalmers tekniska högskolaEcole Polytechnique Federale de Lausanne (EPFL) (creator_code:org_t)

By the author/editor: Engelsen, Nils J ...; Beccari, Alberto; Kippenberg, Tobi ...

About the subject

NATURAL SCIENCES: NATURAL SCIENCES; and Physical Science ...; and Condensed Matter ...

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