Mechanically Coupled Comb Drive MEMS Stages

• An electrostatic large clear-aperture in-plane scanner with a novel actuation principle Is presented for fast and large stroke scanning applications. 9 μm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Telekommunikation (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Telecommunications (hsv//eng)

Keyword

electrostatic actuation

Mechanical coupling

MEMS stage

Publication and Content Type

kon (subject category)

ref (subject category)