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X-RAY PHOTOELECTRON...
X-RAY PHOTOELECTRON SPECTROSCOPY FOR LAYER-BY-LAYER PHASE ANALYSIS OF NbN THIN FILMS
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Lubenchenko, Alexander, 1966 (author)
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Batrakov, Alexander (author)
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- Pavolotskiy, Alexey, 1968 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Krause, Sascha, 1989 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Shurkaeva, Irina (author)
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(creator_code:org_t)
- ISBN 9785426304420
- 2016
- 2016
- Russian.
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In: 25th Spectroscopy Meeting. - 9785426304420 ; , s. 415-
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http://publications.... (primary) (free)
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Abstract
Subject headings
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- This paper studied the chemical and phase composition of NbN thin films by x-ray photoelectron spectroscopy (XPS).Determined the relative concentrations of (O, Nb, N, C, Si) and carried out layer-by-layer phase analysis of the filmsbefore sputtering and after each cycle of sputtering. Before spraying in the nitride film detected two different phasestates niobium nitride, NbN, and presumably this Nb5N6. Analysis of the Nb 3d and C 1s lines allowed to reveal inaddition to these phases of niobium nitride, various oxides of niobium (Nb2O5, NbO2, Nb2O3, NbO) and NbNOx
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- XPS
- chemical composition
- thin films
- spectral lines
Publication and Content Type
- kon (subject category)
- ref (subject category)
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