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Search: onr:"swepub:oai:research.chalmers.se:81951ecd-921b-45c8-b128-00aeaa1f0330" > Novel high-k/metal ...

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  • Engström, Olof,1943Chalmers tekniska högskola,Chalmers University of Technology (author)

Novel high-k/metal gate materials

  • Article/chapterEnglish2007

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  • 2007

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  • LIBRIS-ID:oai:research.chalmers.se:81951ecd-921b-45c8-b128-00aeaa1f0330
  • https://research.chalmers.se/publication/67378URI

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  • Language:English

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  • Subject category:kon swepub-publicationtype
  • Subject category:ref swepub-contenttype

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  • Hurley, P.K. (author)
  • Buiu, O (author)
  • Lemme, M.C. (author)
  • Chalmers tekniska högskola (creator_code:org_t)

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  • In:SiNANO Worksshop at ESSDERC 07, Munich

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