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Gate stacks
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- Engström, Olof, 1943 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Mitrovic, I. Z. (author)
- University of Liverpool
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- Hall, S. (author)
- University of Liverpool
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- Gottlob, H. D. B. (author)
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- (creator_code:org_t)
- 2013-03-05
- 2013
- English.
- In: Nanoscale CMOS: Innovative Materials, Modeling and Characterization. - : Wiley. ; , s. 23 - 67
- Book chapter (other academic/artistic)
Subject headings
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- AlN buffer layer
- GdSiO/LaSiO
- MOSFETs
- Metal gate
- Gate stacks
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- kap (subject category)
- vet (subject category)
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- Nanoscale CMOS: Innovative Materials, Modeling and Characterization (Search for host publication in LIBRIS)
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- Lemme, M.C.
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