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Fabrication and cha...
Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer
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- Emadi, A. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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- Wu, H. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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- Grabarnik, S. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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- De Graaf, G. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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- Hedsten, Karin, 1964 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Enoksson, Peter, 1957 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Correia, J. H. (author)
- Universidade do Minho,University of Minho
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- Wolffenbuttel, R. F. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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(creator_code:org_t)
- Elsevier BV, 2010
- 2010
- English.
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In: Sensors and Actuators, A: Physical. - : Elsevier BV. - 0924-4247. ; 162:2; Sp. Iss. SI, s. 400-405
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Abstract
Subject headings
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- This paper reports on an IC-Compatible process for the fabrication of Linear Variable Optical Filter (LVOF). The LVOF is integrated with a detector array to result in a micro-spectrometer. The technological challenge in fabrication of an LVOF is fabrication of a well-controlled tapered cavity layer. Very small taper angles, ranging from 0.001 degrees to 0.1 degrees. are fabricated in a resist layer by just one lithography step and a subsequent reflow process. The 3D pattern of resist structures is subsequently transferred into SiO2 by an appropriate etching. Complete LVOF fabrication involves CMOS-compatible deposition of a lower dielectric mirror using a stack of dielectrics on the wafer, tapered layer formation and the deposition of the top dielectric mirror. The design principle, IC-Compatible processing and the characterization results on fabricated LVOFs are presented. (C) 2010 Elsevier B.V. All rights reserved.
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- Tapered layer
- Optical filter
- Thin film
- Linear variable filter
- Micro-spectrometer
- Reflow
Publication and Content Type
- art (subject category)
- ref (subject category)
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- By the author/editor
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Emadi, A.
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Wu, H.
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Grabarnik, S.
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De Graaf, G.
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Hedsten, Karin, ...
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Enoksson, Peter, ...
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show more...
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Correia, J. H.
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Wolffenbuttel, R ...
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show less...
- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
- Articles in the publication
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Sensors and Actu ...
- By the university
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Chalmers University of Technology