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Plasma assisted low...
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Amirfeiz, Petra,1973Chalmers tekniska högskola,Chalmers University of Technology
(author)
Plasma assisted low temperature wafer bonding: void formation in the oxide free interface
- Article/chapterEnglish2003
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LIBRIS-ID:oai:research.chalmers.se:a945f93d-4476-46d3-bafe-845e6434bb7e
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https://research.chalmers.se/publication/16201URI
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Subject category:kon swepub-publicationtype
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Subject category:ref swepub-contenttype
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Sanz-Velasco, Anke,1971Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)ankesanz
(author)
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Bengtsson, Stefan,1961Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)stefanb
(author)
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Chalmers tekniska högskola
(creator_code:org_t)
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In:Proceedings of the 7th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications, Paris, France (2003)
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