XPS Study of Niobium and Niobium-Nitride Nanofilms

Lubenschenko, A. (author): National Research University Moscow Power Engineering Institute

Batrakov, A (author): National Research University Moscow Power Engineering Institute

Shurkaeva, I. V. (author): National Research University Moscow Power Engineering Institute

Pavolotskiy, Alexey, 1968 (author): Chalmers tekniska högskola,Chalmers University of Technology

Krause, Sascha, 1989 (author): Chalmers tekniska högskola,Chalmers University of Technology

Ivanov, Dmitriy (author): National Research University Moscow Power Engineering Institute

Lubenchenko, Olga (author): National Research University Moscow Power Engineering Institute

(creator_code:org_t)

2018
2018
English.
In: Journal of Surface Investigation. - 1819-7094 .- 1027-4510. ; 12:4, s. 692-700

Related links:: https://doi.org/10.1...; show more...; https://research.cha...; show less...

Abstract Subject headings

A new, XPS-based approach to quantitative and nondestructive determination of the chemical and phase layer composition of multicomponent multilayer films is proposed. It includes a new method for subtracting the background of repeatedly inelastically scattered photoelectrons, taking into account the inhomogeneity of inelastic scattering over depth; a new way of decomposing a photoelectron line into component peaks, taking into account the physical nature of various decomposition parameters; solution of the problem of subtracting the background and decomposing the photoelectron line simultaneously; and determination of the thickness of the layers of a multilayer target using a simple equation. The phase-layer composition of nanoscale Nb and NbN films is determined, and the thicknesses of these layers are calculated.

NATURVETENSKAP -- Fysik -- Annan fysik (hsv//swe)
NATURAL SCIENCES -- Physical Sciences -- Other Physics Topics (hsv//eng)
TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Annan materialteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Other Materials Engineering (hsv//eng)
NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

By the author/editor: Lubenschenko, A.; Batrakov, A; Shurkaeva, I. V.; Pavolotskiy, Ale ...; Krause, Sascha, ...; Ivanov, Dmitriy; show more...; Lubenchenko, Olg ...; show less...

About the subject

NATURAL SCIENCES: NATURAL SCIENCES; and Physical Science ...; and Other Physics To ...

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Materials Engine ...; and Other Materials ...

NATURAL SCIENCES: NATURAL SCIENCES; and Physical Science ...; and Condensed Matter ...

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