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Growth of GaSb1-xBix by molecular beam epitaxy

Song, Yuxin, 1981 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Wang, Shu Min, 1963 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Roy, Ivy Saha (author)
Chalmers tekniska högskola,Chalmers University of Technology
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Shi, Peixiong (author)
Hallén, Anders (author)
KTH,Integrerade komponenter och kretsar
Wang, Shumin (author)
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 (creator_code:org_t)
American Vacuum Society, 2012
2012
English.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. - : American Vacuum Society. - 2166-2754 .- 2166-2746. ; 30:2, s. 02B114-
  • Journal article (peer-reviewed)
Abstract Subject headings
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  • Molecular beam epitaxy for GaSb1-xBix is investigated in this article. The growth window for incorporation of Bi in GaSb was found. Strategies of avoiding formation of Bi droplets and enhancing Bi incorporation were studied. The Bi incorporation was confirmed by SIMS and RBS measurements. The Bi concentration in the samples was found to increase with increasing growth temperature and Bi flux. The position of GaSb1-xBix layer peak in XRD rocking curves is found to be correlated to Bi composition. Surface and structural properties of the samples were also investigated. Samples grown on GaSb and GaAs substrates were compared and no apparent difference for Bi incorporation was found.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Telekommunikation (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Telecommunications (hsv//eng)
TEKNIK OCH TEKNOLOGIER  -- Materialteknik -- Annan materialteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Materials Engineering -- Other Materials Engineering (hsv//eng)
TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Keyword

bismuth alloys
Rutherford backscattering
silicon alloys
gallium alloys
secondary ion mass spectra
molecular beam epitaxial growth
X-ray diffraction

Publication and Content Type

art (subject category)
ref (subject category)

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