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Linear variable opt...
Linear variable optical filter-based ultraviolet microspectrometer
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- Emadi, A. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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- Wu, H. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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- De Graaf, G. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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- Enoksson, Peter, 1957 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Correia, J. H. (author)
- Universidade do Minho,University of Minho
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- Wolffenbuttel, R. F. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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(creator_code:org_t)
- 2012
- 2012
- English.
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In: Applied Optics. - 1559-128X .- 2155-3165. ; 51:19, s. 4308-4315
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Abstract
Subject headings
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- An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.
Subject headings
- NATURVETENSKAP -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)
Keyword
- roughness
- resolution
- chip
- mirrors
- uv
- spectroscopy
Publication and Content Type
- art (subject category)
- ref (subject category)
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