MEMS sensor for in situ TEM Atomic Force Microscopy

Nafari, Alexandra, 1980 (author): Chalmers tekniska högskola,Chalmers University of Technology

Karlén, David, 1979 (author): Chalmers tekniska högskola,Chalmers University of Technology

Rusu, Cristina (author)

Svensson, Krister (author)

Olin, Håkan (author)

Enoksson, Peter, 1957 (author): Chalmers tekniska högskola,Chalmers University of Technology

(creator_code:org_t)

2007
2007
English.
In: IEEE 20th International Conference on Micro Electro Mechanical Systems, 2007. MEMS. - 1084-6999. ; , s. 103-106

Abstract Subject headings

AbstractHere we present a MEMS atomic force microscope (AFM) sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nN range. The main design challenges of the sensor are a high sensitivity and the narrow dimensions of the pole gap inside the TEM. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We present in situ TEM force measurements on nanotubes, which demonstrates the ability to measure spring constants of nanoscale systems.

By the author/editor: Nafari, Alexandr ...; Karlén, David, 1 ...; Rusu, Cristina; Svensson, Kriste ...; Olin, Håkan; Enoksson, Peter, ...

About the subject

NATURAL SCIENCES: NATURAL SCIENCES; and Physical Science ...; and Condensed Matter ...

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