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- Afanasev, V. V. (author)
Wafer Bonding Induced Degradation Of Thermal Silicon Dioxide Layers On Silicon
- Article/chapterEnglish1995
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- 1995
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- LIBRIS-ID:oai:research.chalmers.se:f4e4a293-fd3d-44d4-8e8d-b9086375696e
- https://research.chalmers.se/publication/17696URI
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- Language:English
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- Ericsson, Per,1968Chalmers tekniska högskola,Chalmers University of Technology (author)
- Bengtsson, Stefan,1961Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)stefanb (author)
- Andersson, Mats O.,1963Chalmers tekniska högskola,Chalmers University of Technology (author)
- Chalmers tekniska högskola (creator_code:org_t)
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- In:Applied Physics Letters66:13, s. 1653-1655
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