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Application of SOI ...
Application of SOI based sensors for MEMS wafer-level packaging
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- Alavian Ghavanini, Farzan, 1978 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Rusu, Cristina (author)
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Persson, Katrin (author)
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Hassl, Sjoerd (author)
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Rödjegård, Henrik (author)
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- Enoksson, Peter, 1957 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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show less...
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(creator_code:org_t)
- 2006
- 2006
- English.
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In: EuroSOI conference proceedings. ; 1:1, s. 115,116-
- Related links:
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https://research.cha...
Subject headings
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Annan teknik -- Övrig annan teknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Other Engineering and Technologies -- Other Engineering and Technologies not elsewhere specified (hsv//eng)
Publication and Content Type
- art (subject category)
- ref (subject category)
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