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Self-organization during Growth of ZrN/SiNx Multilayers by Epitaxial Lateral Overgrowth
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- Fallqvist, Amie (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Ghafoor, Naureen (författare)
- Linköpings universitet,Nanostrukturerade material,Tekniska högskolan
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- Fager, Hanna (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Hultman, Lars (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Persson, Per O A (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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(creator_code:org_t)
- AIP Publishing, 2013
- Engelska.
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Ingår i: Journal of Applied Physics. - : AIP Publishing. - 0021-8979 .- 1089-7550. ; 114:224302
- Relaterad länk:
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https://liu.diva-por... (primary) (Raw object)
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http://liu.diva-port...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- ZrN/SiNx nanoscale multilayers were deposited on ZrN seed layers grown on top of MgO(001) substrates by dc magnetron sputtering with a constant ZrN thickness of 40 Å and with an intended SiNx thickness of 2, 4, 6, 8, and 15 Å at a substrate temperature of 800 °C and 6 Å at 500 °C. The films were investigated by X-ray diffraction, high-resolution scanning transmission electron microscopy, and energy dispersive X-ray spectroscopy. The investigations show that the SiNx is amorphous and that the ZrN layers are crystalline. Growth of epitaxial cubic SiNx – known to take place on TiN(001) – on ZrN(001) is excluded to the monolayer resolution of this study. During the course of SiNx deposition, the material segregates to form surface precipitates in discontinuous layers for SiNx thicknesses ≤ 6 Å that coalesce into continuous layers for 8 and 15 Å thickness at 800 °C, and for 6 Å at 500 °C. The SiNx precipitates are aligned vertically. The ZrN layers in turn grow by epitaxial lateral overgrowth on the discontinuous SiNx in samples deposited at 800 °C with up to 6 Å thick SiNx layers. Effectively a self-organized nanostructure can be grown consisting of strings of 1-3 nm large SiNx precipitates along apparent column boundaries in the epitaxial ZrN.
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)