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Thermal Stability a...
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Eklund, Per,1977-Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
(författare)
Thermal Stability and Phase Transformations of γ-/Amorphous-Al2O3 Thin Films
- Artikel/kapitelEngelska2009
Förlag, utgivningsår, omfång ...
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2009-03-17
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Wiley,2009
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printrdacarrier
Nummerbeteckningar
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LIBRIS-ID:oai:DiVA.org:liu-52722
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https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-52722URI
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https://doi.org/10.1002/ppap.200932301DOI
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Språk:engelska
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Sammanfattning på:engelska
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Ämneskategori:ref swepub-contenttype
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Ämneskategori:art swepub-publicationtype
Anmärkningar
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Magnetron-sputtered Al2O3 thin films were annealed in ambient air. The phase compositions of the as-deposited Al2O3 films were (i) fully amorphous, (ii) nanocrystalline γ-Al2O3 in an amorphous Al2O3 matrix, and (iii) fully crystalline γ. For all samples, annealing to 1 100-1 150 °C resulted in a transformation to α-alumina. The transformation paths depend on the phase fraction of γ in the as-deposited films. For amorphous films and films with low initial γ fraction, the intermediate phase θ-Al2O3 appeared in the range of 1 000-1 100 °C. For predominantly crystalline γ-Al2O3 as-deposited films no intermediate Al2O3 phases were observed, indicating a direct γ-to-α phase transformation at ≈1 100 °C.
Ämnesord och genrebeteckningar
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annealing
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atomic force microscopy (AFM)
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faceting
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sputtering
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X-ray diffraction (XRD)
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NATURAL SCIENCES
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NATURVETENSKAP
Biuppslag (personer, institutioner, konferenser, titlar ...)
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Sridharan, M.Interdisciplinary Nanoscience Center (iNANO) and Department of Physics and Astronomy, University of Aarhus, DK-800 Aarhus C, Denmark
(författare)
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Singh, G.Interdisciplinary Nanoscience Center (iNANO) and Department of Physics and Astronomy, University of Aarhus, DK-800 Aarhus C, Denmark
(författare)
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Bottiger, JorgenInterdisciplinary Nanoscience Center (iNANO) and Department of Physics and Astronomy, University of Aarhus, DK-800 Aarhus C, Denmark
(författare)
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Linköpings universitetTunnfilmsfysik
(creator_code:org_t)
Sammanhörande titlar
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Ingår i:Plasma processes and polymers: Wiley6:1, s. 907-9111612-8850
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