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Cryogenic performan...
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Jacob, A PChalmers
(författare)
Cryogenic performance of ultrathin oxide MOS capacitors with in situ doped p(+) poly-Si1-xGex and poly-Si gate materials
- Artikel/kapitelEngelska2002
Förlag, utgivningsår, omfång ...
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2002-07-19
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Iop Publishing Ltd,2002
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printrdacarrier
Nummerbeteckningar
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LIBRIS-ID:oai:DiVA.org:liu-59175
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https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-59175URI
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https://doi.org/10.1088/0268-1242/17/9/307DOI
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Språk:engelska
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Sammanfattning på:engelska
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Ämneskategori:ref swepub-contenttype
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Ämneskategori:art swepub-publicationtype
Anmärkningar
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A low-temperature electrical characterization of ultrathin oxide MOS capacitors with p(+) poly-Si1-xGex and poly-Si gate is performed. The investigated structures are suitable for future nano-scaled high speed MOSFETs. The aim of this study is to compare the low-temperature performance of poly-Si1-xGex and poly-Si gate MOS structures in the nanoscale channel length regime. Apart from the significant change in the flat band voltage, the result shows that all the poly-Si and poly-Si1-xGex gated MOS structures exhibit two centres of polarity change (zero-temperature coefficients) in capacitance. The second polarity change leads to an exclusive phenomenon in these structures. The low-temperature capacitance is found to be less than high-temperature capacitance at strong accumulation and this is in contrast to what has been observed so far in metal-gated capacitors. It is also observed that the temperature dependence of the tunnelling current is only on the oxide thickness and not on the gate material used.
Ämnesord och genrebeteckningar
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TECHNOLOGY
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TEKNIKVETENSKAP
Biuppslag (personer, institutioner, konferenser, titlar ...)
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Myrberg, TChalmers
(författare)
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Nour, OmerChalmers(Swepub:liu)omeno75
(författare)
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Willander, MagnusChalmers(Swepub:liu)magwi72
(författare)
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Lundgren, PChalmers
(författare)
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Sveinbjörnsson, E ÖChalmers
(författare)
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Ye, L LChalmers
(författare)
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Thölen, AChalmers
(författare)
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Caymax, MInteruniversity Microelectronics Centre (IMEC), Leuven, Belgium
(författare)
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ChalmersInteruniversity Microelectronics Centre (IMEC), Leuven, Belgium
(creator_code:org_t)
Sammanhörande titlar
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Ingår i:Semiconductor Science and Technology: Iop Publishing Ltd17:9, s. 942-9460268-12421361-6641
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