Sökning: onr:"swepub:oai:DiVA.org:uu-174582" > Deposition and char...
Fältnamn | Indikatorer | Metadata |
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000 | 03285naa a2200445 4500 | |
001 | oai:DiVA.org:uu-174582 | |
003 | SwePub | |
008 | 120522s2012 | |||||||||||000 ||eng| | |
024 | 7 | a https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-1745822 URI |
024 | 7 | a https://doi.org/10.1016/j.vacuum.2012.01.0212 DOI |
040 | a (SwePub)uu | |
041 | a engb eng | |
042 | 9 SwePub | |
072 | 7 | a ref2 swepub-contenttype |
072 | 7 | a art2 swepub-publicationtype |
100 | 1 | a Andersson, Matildau Uppsala universitet,Oorganisk kemi4 aut0 (Swepub:uu)matha990 |
245 | 1 0 | a Deposition and characterization of magnetron sputtered amorphous Cr-C films |
264 | 1 | b Elsevier BV,c 2012 |
338 | a print2 rdacarrier | |
520 | a Thin films in the Cr-C system with carbon content of 25-85 at.% have been deposited using non-reactive DC magnetron sputtering from elemental targets. Analyses with X-ray diffraction and transmission electron microscopy confirm that the films are completely amorphous. Also, annealing experiment show that the films had not crystallized at 500 degrees C. Furthermore, X-ray spectroscopy and Raman spectroscopy show that the films consist of two phases, an amorphous CrCx phase and an amorphous carbon (a-C) phase. The presence of two amorphous phases is also supported by the electrochemical analysis, which shows that oxidation of both chromium and carbon contributes to the total current in the passive region. The relative amounts of these amorphous phases influence the film properties. Typically, lower carbon content with less a-C phase leads to harder films with higher Young's modulus and lower resistivity. The results also show that both films have lower currents in the passive region compared to the uncoated 316L steel substrate. Finally, our results were compared with literature data from both reactively and non-reactively sputtered chromium carbide films. The comparison reveals that non-reactive sputtering tend to favour the formation of amorphous films and also influence e.g. the sp(2)/sp(3) ratio of the a-C phase. | |
650 | 7 | a NATURVETENSKAPx Kemix Oorganisk kemi0 (SwePub)104042 hsv//swe |
650 | 7 | a NATURAL SCIENCESx Chemical Sciencesx Inorganic Chemistry0 (SwePub)104042 hsv//eng |
653 | a Amorphous | |
653 | a Chromium carbide | |
653 | a Magnetron sputtering | |
653 | a Electrochemical | |
653 | a Nanoindentation | |
653 | a Inorganic chemistry | |
653 | a Oorganisk kemi | |
653 | a Kemi med inriktning mot oorganisk kemi | |
653 | a Chemistry with specialization in Inorganic Chemistry | |
700 | 1 | a Högström, Jonasu Uppsala universitet,Oorganisk kemi4 aut0 (Swepub:uu)johog205 |
700 | 1 | a Urbonaite, Sigitau Uppsala universitet,Strukturkemi4 aut |
700 | 1 | a Furlan, Andreju Uppsala universitet,Oorganisk kemi4 aut |
700 | 1 | a Nyholm, Leifu Uppsala universitet,Oorganisk kemi4 aut0 (Swepub:uu)lny18455 |
700 | 1 | a Jansson, Ulfu Uppsala universitet,Oorganisk kemi4 aut0 (Swepub:uu)uja03434 |
710 | 2 | a Uppsala universitetb Oorganisk kemi4 org |
773 | 0 | t Vacuumd : Elsevier BVg 86:9, s. 1408-1416q 86:9<1408-1416x 0042-207Xx 1879-2715 |
856 | 4 8 | u https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-174582 |
856 | 4 8 | u https://doi.org/10.1016/j.vacuum.2012.01.021 |
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