Monolithic integration of continuous-relief diffractive structures with vertical-cavity surface-emitting lasers

In this work, we have studied the transfer of diffractive optical elements (DOEs), originally made in resist, into GaAs for monolithic integration with vertical-cavity surface-emitting lasers (VCSELs). The DOEs are blazed gratings and Fresnel lenses, and have been fabricated on the back surface of bottom emitting VCSELs using electron-beam lithography or replication by hot embossing in resist followed by a quick-dry etch step. Diffraction efficiency was measured to be 81% in the first order of diffraction for the blazed grating.

Nikolajeff, FredrikUppsala universitet,Materialvetenskap(Swepub:uu)fni28025 (författare)
Vukusic, JChalmers University of Technology, Sweden (författare)
Martinsson, HChalmers University of Technology, Sweden (författare)
Bengtsson, JChalmers University of Technology, Sweden (författare)
Larsson, AChalmers University of Technology, Sweden (författare)
Uppsala universitetMaterialvetenskap (creator_code:org_t)

Av författaren/redakt...: Karlsson, Mikael; Nikolajeff, Fred ...; Vukusic, J; Martinsson, H; Bengtsson, J; Larsson, A

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