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Electromigration be...
Electromigration behavior of Cu metallization interfacing with Ta versus TaN at high temperatures
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- Mardani, Shabnam, 1983- (författare)
- Uppsala universitet,Fasta tillståndets elektronik
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- Norström, Hans (författare)
- Uppsala universitet,Fasta tillståndets elektronik
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- Smith, Ulf (författare)
- Uppsala universitet,Fasta tillståndets elektronik
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- Gustavsson, Fredrik (författare)
- Uppsala universitet,Fasta tillståndets elektronik
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- Olsson, Jörgen (författare)
- Uppsala universitet,Fasta tillståndets elektronik
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- Zhan, Shi-Li (författare)
- Uppsala universitet,Fasta tillståndets elektronik
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(creator_code:org_t)
- American Vacuum Society, 2016
- 2016
- Engelska.
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Ingår i: Journal of Vacuum Science & Technology B. - : American Vacuum Society. - 1071-1023 .- 1520-8567. ; 34:6
- Relaterad länk:
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https://uu.diva-port... (primary) (Raw object)
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http://uu.diva-porta...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- High-temperature stability of Cu-based interconnects is of technological importance for electronic circuits based on wide band gap semiconductors. In this study, different metal stack combinations using Ta or TaN as capping- and/or barrier-layer, in the configuration cap/Cu/barrier, are evaluated electrically and morphologically prior to and after high-temperature treatments. The symmetric combinations Ta/Cu/Ta and TaN/Cu/TaN are characterized by a low and stable sheet resistance after annealing up to 700 °C. Asymmetric combinations of Ta/Cu/TaN and TaN/Cu/Ta, however, display an increase in sheet resistance values after annealing at 500 °C and above. This increase in sheet resistance is considered to result from Ta diffusion into the grain boundaries of the Cu film. The preliminary electromigration studies on the TaN/Cu/Ta and TaN/Cu/TaN structures show a twofold higher activation energy and a tenfold longer lifetime for the former, thus suggesting an important role of the interface between Cu and the cap and/or barrier.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
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- ref (ämneskategori)
- art (ämneskategori)
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