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Component for elect...
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Bergstedt, Leif
(författare)
Component for electromagnetic waves and a method for manufacturing the same
Förlag, utgivningsår, omfång ...
Nummerbeteckningar
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LIBRIS-ID:oai:research.chalmers.se:113019ee-2d13-4420-bff5-40c2e34c39ca
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https://research.chalmers.se/publication/212972URI
Kompletterande språkuppgifter
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Språk:engelska
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Sammanfattning på:engelska
Ingår i deldatabas
Klassifikation
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Ämneskategori:pat swepub-publicationtype
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Ämneskategori:vet swepub-contenttype
Anmärkningar
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The present invention relates to a method for fabricating a cavity in substrate for a component for electromagnetic waves, the method comprising providing said cavity by removal of material from said substrate by removal of material by immersing the substrate in a liquid bath of a chemical etchant, so that resultant cavity has a top and a bottom side and sidewalls, and said cavity at one of said top and/or bottom sides exhibits an at least a four sided opening having an opening with at least two different adjacent angles. The invention also relates to the component for microwave applications.
Ämnesord och genrebeteckningar
Biuppslag (personer, institutioner, konferenser, titlar ...)
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Gevorgian, Spartak,1948Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)spartak
(författare)
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Gustafsson, Marika
(författare)
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Chalmers tekniska högskola
(creator_code:org_t)
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