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ZrO2 gate dielectri...
ZrO2 gate dielectrics prepared by e-beam deposition of Zr and YSZ films and post annealing processes
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- Johansson, Mikael (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Yousif, M. Y. A., 1963 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Sareen, Alok, 1972 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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visa fler...
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- Lundgren, Per, 1968 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Bengtsson, Stefan, 1961 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Södervall, Ulf, 1954 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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visa färre...
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(creator_code:org_t)
- 2002
- 2002
- Engelska.
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Ingår i: ESSDERC 2002. Proceedings of the 32nd European Solid-State Device Research Conference. ; , s. 419-
- Relaterad länk:
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https://research.cha...
Abstract
Ämnesord
Stäng
- In this paper we present the electrical performance of MOS capacitors with ZrO2 gate dielectric prepared by e-beam evaporation of zirconium and yttrium stabilized zirconia (YSZ) and subsequent thermal treatment. To this stage we have reached an equivalent oxide thickness (EOT) of 1.9 nm. The effect of post-oxidation annealing on Zr incorporation into the Si substrate is investigated. SIMS analysis showed no signs of Zr diffusion in the substrate at temperatures as high as 900°C and that significant diffusion occurs only at 1100°C
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- dielectric thin films
- CMOS integrated circuits
- permittivity
- diffusion
- integrated circuit testing
- MOS capacitors
- oxidation
- annealing
- secondary ion mass spectra
- zirconium compounds
- electron beam deposition
Publikations- och innehållstyp
- kon (ämneskategori)
- ref (ämneskategori)