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- Azevedo, GD, et al.
(författare)
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EXAFS measurements of metal-decorated nanocavities in Si
- 2003
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Ingår i: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. - 0168-583X. ; 199, s. 179-184
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Konferensbidrag (refereegranskat)abstract
- This contribution presents a sample preparation methodology to enable the identification, with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates. Preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities are reported. (C) 2002 Elsevier Science B.V. All rights reserved.
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