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- Vorobiev, Andrei, 1963, et al.
(författare)
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Improved Tunable Performance of high Q-factor BaxSr1-xTiO3 Film Bulk Acoustic Wave Resonators
- 2012
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Ingår i: 15th European Microwave Week - Space for Microwaves Conference Proceedings. - 9782874870286 ; , s. 1-3
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Konferensbidrag (refereegranskat)abstract
- Improved tunable performance of high Q-factor BaxSr1-xTiO3 film bulk acoustic wave resonators (FBARs) achieved by varying Ba concentration. The Ba0.5Sr0.5TiO3 FBARs reveal tunability of series resonance frequency up to 2.4%, electromechanical coupling coefficient up to 7.5% and rather high figure of merit, Qf1300 GHz. Correlations between the measured electroacoustic parameters are analyzed using the theory of dc bias induced piezoelectric effect in paraelectric phase ferroelectrics.
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