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  • Takahashi, M., et al. (author)
  • Oxygen annealing effect of photoelectron spectra in SrBi2Ta2O9 film
  • 2002
  • In: Japanese Journal of Applied Physics. - 0021-4922 .- 1347-4065. ; 41:11B, s. 6797-6802
  • Journal article (peer-reviewed)abstract
    • Photoelectron spectra have been studied to clarify O-2-annealing effects on the band diagram of the metal-SrBi2Ta2O9 (SBT) junction and ionization energy of SBT films deposited by the pulsed laser, deposition (PLD) method. Photoemission spectra obtained by ultraviolet light irradiation have a threshold of 5.90 eV for the as-deposited SBT film and 5.56 eV for the O-2-annealed one. This shift of the threshold indicates that the annealing treatment has increased the Fermi level by 0.34 eV. On the assumption of a 4.2 eV band gap and 3.5 eV electron affinity for the SBT, as-deposited SBT has been estimated to give a 0.60 eV lower barrier height for holes than that for electrons, which is possibly because of, insufficiently oxidized (Bi2O2)(2+) layers as indicated by X-ray photoelectron spectroscopy (XPS). After annealing in O-2, however, barrier height energies for holes and electrons become closer to each other. These results agree with our previous studies which have reported that the O-2-annealing suppressed the leakage current through SBT and improved the retention characteristics of the metal-ferroelectric-insulator-semiconductor structure.
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Type of publication
journal article (1)
Type of content
peer-reviewed (1)
Author/Editor
Takahashi, M. (1)
Grishin, Alexander M ... (1)
Kodama, K. (1)
Noda, M. (1)
Okuyama, M (1)
Hedblom, P. (1)
University
Royal Institute of Technology (1)
Language
English (1)
Year

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