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- Böhlmark, Johan, et al.
(författare)
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Spatial electron density distribution in a high-power pulsed magnetron discharge
- 2005
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Ingår i: IEEE Transactions on Plasma Science. - 0093-3813 .- 1939-9375. ; 33:2, s. 346-347
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Tidskriftsartikel (refereegranskat)abstract
- The spatial electron density distribution was measured as function of time in a high-power pulsed magnetron discharge. A Langmuir probe was positioned in various positions below the target and the electron density was mapped out. We recorded peak electron densities exceeding 1019 m-3 in a close vicinity of the target. The dynamics of the discharge showed a dense plasma expanding from the "race-track" axially into the vacuum chamber. We also record electrons trapped in a magnetic bottle where the magnetron magnetic field is zero, formed due to the unbalanced magnetron.
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