| 1. |
- Jokubavicius, Valdas, 1983-, et al.
(författare)
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Silicon Carbide Surface Cleaning and Etching
- 2018
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Ingår i: Advancing Silicon Carbide Electronics Technology I. - : Materials Research Forum LLC. - 9781945291845 - 9781945291852 ; , s. 1-26
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Bokkapitel (refereegranskat)abstract
- Silicon carbide (SiC) surface cleaning and etching (wet, electrochemical, thermal) are important technological processes in preparation of SiC wafers for crystal growth, defect analysis or device processing. While removal of organic, particulate and metallic contaminants by chemical cleaning is a routine process in research and industrial production, the etching which, in addition to structural defects analysis, can also be used to modify wafer surface structure, is very interesting for development of innovative device concepts. In this book chapter we review SiC chemical cleaning and etching procedures and present perspectives of SiC etching for new device development.
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| 2. |
- Li, Fan, et al.
(författare)
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Electrical Characterisation of Thick 3C-SiC Layers Grown on Off-Axis 4H-SiC Substrates
- 2019
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Ingår i: Materials Science Forum. - : Trans Tech Publications. - 0255-5476 .- 1662-9752. ; 963, s. 353-356
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Tidskriftsartikel (refereegranskat)abstract
- 300 μm thick 3C-SiC epilayer was grown on off-axis 4H-SiC(0001) substrate with a high growth rate of 1 mm/hour. Dry oxidation, wet oxidation and N2O anneal were applied to fabricate lateral MOS capacitors on these 3C-SiC layers. MOS interface obtained by N2O anneal has the lowest interface trap density of 3~4x1011 eV-1cm-2. Although all MOS capacitors still have positive net charges at the MOS interface, the wet oxidised sample has the lowest effective charge density of ~9.17x1011 cm-2.
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| 3. |
- Nachawaty, A., et al.
(författare)
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Large nonlocality in macroscopic Hall bars made of epitaxial graphene
- 2018
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Ingår i: Physical Review B. - : AMER PHYSICAL SOC. - 2469-9950 .- 2469-9969. ; 98:4
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Tidskriftsartikel (refereegranskat)abstract
- We report on nonlocal transport in large-scale epitaxial graphene on silicon carbide under an applied external magnetic field. The nonlocality is related to the emergence of the quantum Hall regime and persists up to the millimeter scale. The nonlocal resistance reaches values comparable to the local (Hall and longitudinal) resistances. At moderate magnetic fields, it is almost independent on the in-plane component of the magnetic field, which suggests that spin currents are not at play. The nonlocality cannot be explained by thermoelectric effects without assuming extraordinary large Nernst and Ettingshausen coefficients. A model based on counterpropagating edge states backscattered by the bulk reproduces quite well the experimental data.
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| 4. |
- Rodner, Marius, 1991-, et al.
(författare)
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A platform for extremely sensitive gas sensing : 2D materials on silicon carbide
- 2018
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Ingår i: TechConnect Briefs 2018 - Advanced Materials. - : TechConnect. - 9780998878232 ; , s. 101-104
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Konferensbidrag (refereegranskat)abstract
- 2D materials offer a unique platform for sensing with extreme sensitivity, since minimal chemical interactions cause noticeable changes in the electronic state. An area where this is particularly interesting is environmental monitoring of gases that are hazardous at trace levels. In this study, SiC is used as a base for epitaxial growth of high quality, uniform graphene, and for templated growth of atomically thin layers of platinum, with potential benefits in terms of the ability to operate at higher temperature and to serve as a more robust template for fiinctionalization compared to graphene. Fiinctionalization with nanoparticles allows tuning the sensitivity to specific molecules without damaging the 2D sensor transducer. With this platform we demonstrate detection of nitrogen dioxide, formaldehyde, and benzene at trace concentrations. This, combined with smart sensor signal evaluation allowing fast response times, could allow real-time monitoring of these toxic pollutants at concentrations of relevance to air quality monitoring.
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| 5. |
- Rodner, Marius, 1991-, et al.
(författare)
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Iron oxide nanoparticle decorated graphene for ultra-sensitive detection of volatile organic compounds
- 2018
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Ingår i: Proceedings of EUROSENSORS 2018. - Basel Switzerland : MDPI.
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Konferensbidrag (refereegranskat)abstract
- It has been found that two-dimensional materials, such as graphene, can be used as remarkable gas detection platforms as even minimal chemical interactions can lead to distinct changes in electrical conductivity. In this work, epitaxially grown graphene was decorated with iron oxide nanoparticles for sensor performance tuning. This hybrid surface was used as a sensing layer to detect formaldehyde and benzene at concentrations of relevance in air quality monitoring (low parts per billion). Moreover, the time constants could be drastically reduced using a derivative sensor signal readout, allowing detection at the sampling rates desired for air quality monitoring applications.
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| 6. |
- Santangelo, Maria Francesca, et al.
(författare)
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Epitaxial graphene sensors combined with 3D printed microfluidic chip for heavy metals detection
- 2018
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Ingår i: Proceedings of EUROSENSORS 2018. - Basel Switzerland : MDPI.
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Konferensbidrag (refereegranskat)abstract
- Two-dimensional materials may constitute key elements in the development of a sensing platform where extremely high sensitivity is required, since even minimal chemical interaction can generate appreciable changes in the electronic state of the material. In this work, we investigate the sensing performance of epitaxial graphene on Si-face 4H-SiC (EG/SiC) for liquid-phase detection of heavy metals (e.g., Pb). The integration of preparatory steps needed for sample conditioning is included in the sensing platform, exploiting fast prototyping using a 3D printer, which allows direct fabrication of a microfluidic chip incorporating all the features required to connect and execute the Lab-on-chip (LOC) functions. It is demonstrated that interaction of Pb2+ ions in water-based solutions with the EG enhances its conductivity exhibiting a Langmuir correlation between signal and Pb2+ concentration. Several concentrations of Pb2+ solutions ranging from 125 nM to 500 µM were analyzed showing good stability and reproducibility over time.
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| 7. |
- Shi, Yuchen, et al.
(författare)
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A comparative study of high-quality C-face and Si-face 3C-SiC(1 1 1) grown on off-oriented 4H-SiC substrates
- 2019
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Ingår i: Journal of Physics D. - : Biopress Ltd. - 0022-3727 .- 1361-6463. ; 52:34
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Tidskriftsartikel (refereegranskat)abstract
- We present a comparative study of the C-face and Si-face of 3C-SiC(111) grown on off-oriented 4H-SiC substrates by the sublimation epitaxy. By the lateral enlargement method, we demonstrate that the high-quality bulk-like C-face 3C-SiC with thickness of ~1 mm can be grown over a large single domain without double positioning boundaries (DPBs), which are known to have a strongly negative impact on the electronic properties of the material. Moreover, the C-face sample exhibits a smoother surface with one unit cell height steps while the surface of the Si-face sample exhibits steps twice as high as on the C-face due to step-bunching. High-resolution XRD and low temperature photoluminescence measurements show that C-face 3C-SiC can reach the same high crystalline quality as the Si-face 3C-SiC. Furthermore, cross-section studies of the C- and Si-face 3C-SiC demonstrate that in both cases an initial homoepitaxial 4H-SiC layer followed by a polytype transition layer are formed prior to the formation and lateral expansion of 3C-SiC layer. However, the transition layer in the C-face sample is extending along the step-flow direction less than that on the Si-face sample, giving rise to a more fairly consistent crystalline quality 3C-SiC epilayer over the whole sample compared to the Si-face 3C-SiC where more defects appeared on the surface at the edge. This facilitates the lateral enlargement of 3C-SiC growth on hexagonal SiC substrates.
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| 8. |
- Shi, Yuchen, et al.
(författare)
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Elimination of step bunching in the growth of large-area monolayer and multilayer graphene on off-axis 3CSiC (111)
- 2018
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Ingår i: Carbon. - : Elsevier. - 0008-6223 .- 1873-3891. ; 140, s. 533-542
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Tidskriftsartikel (refereegranskat)abstract
- Multilayer graphene has exhibited distinct electronic properties such as the tunable bandgap for optoelectronic applications. Among all graphene growth techniques, thermal decomposition of SiC is regarded as a promising method for production of device-quality graphene. However, it is still very challenging to grow uniform graphene over a large-area, especially multilayer graphene. One of the main obstacles is the occurrence of step bunching on the SiC surface, which significantly influences the formation process and the uniformity of the multilayer graphene. In this work, we have systematically studied the growth of monolayer and multilayer graphene on off-axis 3CSiC(111). Taking advantage of the synergistic effect of periodic SiC step edges as graphene nucleation sites and the unique thermal decomposition energy of 3CSiC steps, we demonstrate that the step bunching can be fully eliminated during graphene growth and large-area monolayer, bilayer, and four-layer graphene can be controllably obtained on high-quality off-axis 3CSiC(111) surface. The low energy electron microscopy results demonstrate that a uniform four-layer graphene has been grown over areas of tens of square micrometers, which opens the possibility to tune the bandgap for optoelectronic devices. Furthermore, a model for graphene growth along with the step bunching elimination is proposed.
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| 9. |
- Shi, Yuchen, 1991-
(författare)
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Growth of 3C-SiC and Graphene for Solar Water-Splitting Application
- 2019
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Doktorsavhandling (övrigt vetenskapligt/konstnärligt)abstract
- Silicon carbide (SiC) is regarded as an important semiconductor for a variety of applications including high-temperature, high-power and high-frequency devices. The most common polytypes of SiC are hexagonal (4H- or 6H-SiC) and cubic silicon carbide (3C-SiC), which differ from each other by the ordering of the Si–C bilayers along the c-axis crystal direction. Among different polytypes of SiC, 3C-SiC has attracted specific interest due to its prominent properties such as high electron mobility and low interface trap density in MOSFET devices. Moreover, with a relatively small bandgap of 2.36 eV and suitable conduction and valence band positions, 3C-SiC has also been considered as a promising material for solar water splitting application, which provides a completely renewable approach to convert solar energy into storable hydrogen fuel. However, the growth of high-quality 3C-SiC remains a great challenge for decades.Graphene, a single layer of sp2-bonded carbon atoms, has shown outstanding electronic properties and becomes the most promising candidate for next-generation electronic and optoelectronic devices. Epitaxial growth of graphene on SiC substrates by sublimation of Si from SiC provides a feasible route to fabricate wafer-scale device-quality graphene. The most advantage of this method is that a variety of devices can be processed directly on graphene/SiC without any transfer process, which is needed in the case of graphene produced by exfoliation or CVD on metals. During past years, the growth of monolayer (ML) graphene on hexagonal SiC (6H-SiC, 4H-SiC) substrates has been extensively studied. However, it is challenging to grow large-area and uniform multilayer graphene on hexagonal SiC substrates due to the stepbunching issue during the sublimation growth.Multilayer graphene has recently attracted great interest due to its tunable electronic properties for various electronic and optoelectronic applications. It has been shown that the electronic properties of multilayer graphene are strongly influenced by its stacking sequence. In particular, the rhombohedral stacking sequence (ABC stacking) has shown its potential to introduce a flat band energy dispersion at the K points of the Brillouin zone, which would result in many exotic phases of matter such as superconductivity. Among various SiC polytypes, 3CSiC is predicted to be the most suitable substrate for the epitaxial growth of rhombohedral multilayer graphene.This thesis work mainly covers the sublimation growth of high-quality Si-face and C-face 3C-SiC on off-oriented 4H-SiC, exploring the proper parameter window for the growth of homogeneous graphene layers ranging from monolayer to multilayer on Si-face off-oriented 3C-SiC and the growth of graphene on C-face 3C-SiC, as well as the characterizations on 3CSiC and graphene. Moreover, as a proof of concept, photoelectrochemical (PEC) water splitting cells based on the Si-face and C-face 3C-SiC have been fabricated to study the conversion of solar energy into chemical fuel, hydrogen.Firstly, the high-quality bulk-like Si-face and C-face 3C-SiC(111) were grown on 4- degree off-oriented 4H-SiC substrates by the sublimation epitaxy technique. The C-face sample exhibited a smoother surface with a step height of one-unit cell without the step bunching. In contrast, the Si-face 3C-SiC showed larger steps with a height of two-unit cells of 3C-SiC due to the pronounced step bunching. The cross-sectional studies showed that C-face 3C-SiC exhibited less polytype-transition layer than the Si-face sample. This would help the lateral enlargement of 3C-SiC domains. We also demonstrated that the crystalline quality of C-face 3C-SiC was comparable to the Si-face sample.Secondly, we systematically studied the growth of monolayer and multilayer graphene on off-axis 3C-SiC(111). Taking advantage of the synergistic effect of periodic SiC step edges as graphene nucleation sites and the unique thermal decomposition energy of 3C-SiC steps, we demonstrated that the step bunching was fully eliminated during graphene growth on Si-face 3C-SiC and large-area monolayer, bilayer, and four-layer graphene were controllably obtained on high-quality off-axis Si-face 3C-SiC(111). The growth of uniform four-layer graphene over areas of tens of square micrometers was demonstrated. The electronic structures of multilayer graphene with different stacking sequences were systematically studied by experimental and theoretical analysis. It was demonstrated that the four-layer graphene exhibited rhombohedral stacking sequence, which introduced a flat band near the Fermi level. Moreover, the flat-band width and bandgap can be tuned by the interlayer spacing of graphene. In contrast, graphene layers grown on the off-axis C-face 3C-SiC(1̄1̄1̄) showed 1ML to 4ML graphene domains with large-area coverage over several of square micrometers and there was no buffer layer underneath. The low energy electron diffraction pattern collected on the monolayer graphene domain demonstrated four sets of graphene (1 x 1) spots, indicating the existence of rotational disorders within the monolayer graphene. To compare with graphene growth on the off-oriented 3C-SiC, the growth of graphene on off-oriented 4H-SiC epilayers was also explored. The 4HSiC epilayers were first grown on 4-degree off-oriented 4H-SiC substrates and periodically inclined step facets in-between terraces were induced on 4H-SiC epilayers due to the pronounced step bunching. The graphene grown on such step-structured surface of off-oriented 4H-SiC showed that the terraces were mainly covered by monolayer graphene and the buffer layer underneath it while on the step facets, graphene was strongly buckled and appeared to be largely decoupled from the surface.Finally, the PEC water splitting performance based on the Si-face and C-face 3C-SiC was systematically studied. It was found that the SiC surface polarity played an important role in the PEC performance. The influence of both Si-face and C-face on surface proton transfer was investigated. It was demonstrated that the Si-face SiC was more energy-favorable, thus making oxygen evolution reaction operate at a very low overpotential. Furthermore, the PEC watersplitting performance was significantly enhanced by using NiO/3C-SiC p-n junction as a photoanode. A high photovoltage of 1.0 V, a photocurrent density of 1.01 mA/cm-2 at 0.55 V versus reversible hydrogen electrode (VRHE), a low onset potential of 0.20 VRHE and a high fill factor of 57% were demonstrated in the PEC water splitting cell under AM1.5G 100 mW cm-2 illumination.
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| 10. |
- Shtepliuk, Ivan I., 1987-, et al.
(författare)
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Lead (Pb) interfacing with epitaxial graphene
- 2018
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Ingår i: Physical Chemistry, Chemical Physics - PCCP. - : Royal Society of Chemistry. - 1463-9076 .- 1463-9084. ; 20:25, s. 17105-17116
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Tidskriftsartikel (refereegranskat)abstract
- Here, we report the electrochemical deposition of lead (Pb) as a model metal on epitaxial graphene fabricated on silicon carbide (Gr/SiC). The kinetics of electrodeposition and morphological characteristics of the deposits were evaluated by complementary electrochemical, physical and computational methods. The use of Gr/SiC as an electrode allowed the tracking of lead-associated redox conversions. The analysis of current transients passed during the deposition revealed an instantaneous nucleation mechanism controlled by convergent mass transport on the nuclei locally randomly distributed on epitaxial graphene. This key observation of the deposit topology was confirmed by low values of the experimentally-estimated apparent diffusion coefficient, Raman spectroscopy and scanning electron microscopy (SEM) studies. First principles calculations showed that the nucleation of Pb clusters on the graphene surface leads to weakening of the interaction strength of the metal-graphene complex, and only spatially separated Pb adatoms adsorbed on bridge and/or edge-plane sites can affect the vibrational properties of graphene. We expect that the lead adatoms can merge in large metallic clusters only at defect sites that reinforce the metal-graphene interactions. Our findings provide valuable insights into both heavy metal ion electrochemical analysis and metal electroplating on graphene interfaces that are important for designing effective detectors of toxic heavy metals.
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