1. |
- Brewer, Courtney A., et al.
(author)
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High spatial resolution full-field microscopy using a desktop-size soft x-ray laser
- 2007
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In: Proceedings of SPIE. - : SPIE.
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Conference paper (peer-reviewed)abstract
- Images with nanoscale resolution were obtained in both transmission and reflection modes using a full-field microscope that is illuminated by an extremely compact λ = 46.9 nm (hv = 26.4 eV) soft x-ray laser. The microscope was used to image the surface of partially processed silicon semiconductor chips containing periodic patterns of polysilicon and metal lines. To characterize the microscope, modulation transfer functions were experimentally built for three different objective zone plates, and images with near-wavelength resolution were obtained.
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2. |
- Menoni, C. S., et al.
(author)
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Nanometer-scale imaging and ablation with Extreme Ultraviolet lasers
- 2007
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In: 2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5. - 9781424435906 ; , s. 1401-1402
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Conference paper (peer-reviewed)abstract
- The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.
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3. |
- Menoni, C. S., et al.
(author)
-
Nanoscale resolution microscopy and ablation with extreme ultraviolet lasers
- 2007
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In: 2007 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2. - 9781424409242 ; , s. 488-489
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Conference paper (peer-reviewed)abstract
- We obtain a spatial resolution down to 38 run with full field imaging and laser-ablation systems that exploit the short wavelength and high brightness output from compact extreme ultraviolet lasers in combination with zone plate optics.
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