Sökning: onr:"swepub:oai:DiVA.org:kth-16213" >
The ion energy dist...
The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge
-
- Böhlmark, Johan (författare)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan
-
- Lattemann, Martina (författare)
- Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan
-
- Gudmundsson, J. T. (författare)
- Department of Electrical and Computer Engineering, University of Iceland, Reykjavik, Iceland; and Science Institute, University of Iceland, Reykjavik, Iceland
-
visa fler...
-
- Ehiasarian, A. P. (författare)
- Materials and Engineering Research Institute, Sheffield Hallam University, Sheffield, UK
-
- Gonzalvo, Y. Aranda (författare)
- Hiden Analytical Ltd., Warrington, UK
-
- Brenning, Nils (författare)
- KTH,Rymd- och plasmafysik,Division of Plasma Physics, Alfvén Laboratory, Royal Institute of Technology, Stockholm, Sweden
-
- Helmersson, Ulf (författare)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan
-
visa färre...
-
(creator_code:org_t)
- Elsevier BV, 2006
- 2006
- Engelska.
-
Ingår i: Thin Solid Films. - : Elsevier BV. - 0040-6090 .- 1879-2731. ; 515:4, s. 1522-1526
- Relaterad länk:
-
http://urn.kb.se/res...
-
visa fler...
-
https://urn.kb.se/re...
-
https://doi.org/10.1...
-
https://urn.kb.se/re...
-
visa färre...
Abstract
Ämnesord
Stäng
- The energy distribution of sputtered and ionized metal atoms as well as ions from the sputtering gas is reported for a high power impulse magnetron sputtering (HIPIMS) discharge. High power pulses were applied to a conventional planar circular magnetron Ti target. The peak power on the target surface was 1-2 kW/cm(2) with a duty factor of about 0.5%. Time resolved, and time averaged ion energy distributions were recorded with an energy resolving quadrupole mass spectrometer. The ion energy distributions recorded for the HIPIMS discharge are broader with maximum detected energy of 100 eV and contain a larger fraction of highly energetic ions (about 50% with E-i > 20 eV) as compared to a conventional direct current magnetron sputtering discharge. The composition of the ion flux was also determined, and reveals a high metal fraction. During the most intense moment of the discharge, the ionic flux consisted of approximately 50% Ti1+, 24% Ti2+, 23% Ar1+, and 3% Ar2+ ions.
Ämnesord
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Nyckelord
- sputtering
- HIPIMS
- mass spectometry
- plasma characterization
- ionization
- deposition
- densities
- films
- Physics
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
Hitta via bibliotek
Till lärosätets databas