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Interferometric cha...
Interferometric characterization of rotation stages for X-ray nanotomography
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- Stankevic, Tomas (författare)
- Lund University,Lunds universitet,MAX IV-laboratoriet,MAX IV Laboratory
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- Engblom, Christer (författare)
- Synchrotron SOLEIL
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- Langlois, Florent (författare)
- Synchrotron SOLEIL
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- Alves, Filipe (författare)
- Synchrotron SOLEIL
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- Lestrade, Alain (författare)
- Synchrotron SOLEIL
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- Jobert, Nicolas (författare)
- Synchrotron SOLEIL
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- Cauchon, Gilles (författare)
- Synchrotron SOLEIL
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- Vogt, Ulrich (författare)
- KTH Royal Institute of Technology,KTH,Biomedicinsk fysik och röntgenfysik
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- Kubsky, Stefan (författare)
- Synchrotron SOLEIL
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(creator_code:org_t)
- American Institute of Physics (AIP), 2017
- 2017
- Engelska.
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Ingår i: Review of Scientific Instruments. - : American Institute of Physics (AIP). - 0034-6748 .- 1089-7623. ; 88:5
- Relaterad länk:
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http://dx.doi.org/10...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://lup.lub.lu.s...
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Abstract
Ämnesord
Stäng
- The field of three-dimensional multi-modal X-ray nanoimaging relies not only on high-brilliance X-rays but also on high-precision mechanics and position metrology. Currently available state-of-the-art linear and rotary drives can provide 3D position accuracy within tens to hundreds of nm, which is often insufficient for high resolution imaging with nanofocused X-ray beams. Motion errors are especially troublesome in the case of rotation drives and their correction is more complicated and relies on the metrology grade reference objects. Here we present a method which allows the characterisation and correction of the radial and angular errors of the rotary drives without the need for a highly accurate metrology object. The method is based on multi-probe error separation using fiber-laser interferometry and uses a standard cylindrical sample holder as a reference. The obtained runout and shape measurements are then used to perform the position corrections using additional drives. We demonstrate the results of the characterization for a piezo-driven small rotation stage. The error separation allowed us to measure the axis runout to be approximately +/-1.25 mu m, and with active runout compensation this could be reduced down to +/-42 nm.
Ämnesord
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
- NATURVETENSKAP -- Fysik -- Acceleratorfysik och instrumentering (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Accelerator Physics and Instrumentation (hsv//eng)
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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