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On the population d...
On the population density of the argon excited levels in a high power impulse magnetron sputtering discharge
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- Rudolph, M. (författare)
- Leibniz Inst Surface Engn IOM, Permoserstr 15, D-04318 Leipzig, Germany.
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- Revel, A. (författare)
- Univ Paris Saclay, Lab Phys Gaz Plasmas LPGP, UMR 8578, CNRS, F-91405 Orsay, France.
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- Lundin, Daniel (författare)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten,Univ Paris Saclay, France
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- Brenning, Nils (författare)
- Linköpings universitet,KTH,Rymd- och plasmafysik,Linköping Univ, IFM Mat Phys, Plasma & Coatings Phys Div, SE-58183 Linköping, Sweden.;KTH Royal Inst Technol, Sch Elect Engn & Comp Sci, Space & Plasma Phys, SE-10044 Stockholm, Sweden.,Plasma och ytbeläggningsfysik,Tekniska fakulteten
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- Raadu, Michael A. (författare)
- KTH,Rymd- och plasmafysik,KTH Royal Inst Technol, Sweden,Leibniz Inst Surface Engn IOM, Germany; Univ Leipzig, Germany
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- Anders, A. (författare)
- Leibniz Inst Surface Engn IOM, Permoserstr 15, D-04318 Leipzig, Germany.;Univ Leipzig, Felix Bloch Inst Solid State Phys, Linnestr 5, D-04103 Leipzig, Germany.
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- Minea, T. M. (författare)
- Univ Paris Saclay, Lab Phys Gaz Plasmas LPGP, UMR 8578, CNRS, F-91405 Orsay, France.
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- Gudmundsson, Jon Tomas, 1965- (författare)
- KTH,Rymd- och plasmafysik,KTH Royal Inst Technol, Sweden; Univ Iceland, Iceland
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Leibniz Inst Surface Engn IOM, Permoserstr 15, D-04318 Leipzig, Germany Univ Paris Saclay, Lab Phys Gaz Plasmas LPGP, UMR 8578, CNRS, F-91405 Orsay, France. (creator_code:org_t)
- AIP Publishing, 2022
- 2022
- Engelska.
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Ingår i: Physics of Plasmas. - : AIP Publishing. - 1070-664X .- 1089-7674. ; 29:2, s. 023506-
- Relaterad länk:
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https://doi.org/10.1...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- Population densities of excited states of argon atoms in a high power impulse magnetron sputtering (HiPIMS) discharge are examined using a global discharge model and a collisional-radiative model. Here, the ionization region model (IRM) and the Orsay Boltzmann equation for electrons coupled with ionization and excited states kinetics (OBELIX) model are combined to obtain the population densities of the excited levels of the argon atom in a HiPIMS discharge. The IRM is a global plasma chemistry model based on particle and energy conservation of HiPIMS discharges. OBELIX is a collisional-radiative model where the electron energy distribution is calculated self-consistently from an isotropic Boltzmann equation. The collisional model constitutes 65 individual and effective excited levels of the argon atom. We demonstrate that the reduced population density of high-lying excited argon states scales with (p*)(-6), where p * is the effective quantum number, indicating the presence of a multistep ladder-like excitation scheme, also called an excitation saturation. The reason for this is the dominance of electron impact processes in the population and de-population of high-lying argon states in combination with a negligible electron-ion recombination.
Ämnesord
- NATURVETENSKAP -- Fysik -- Fusion, plasma och rymdfysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Fusion, Plasma and Space Physics (hsv//eng)
- NATURVETENSKAP -- Fysik -- Annan fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Other Physics Topics (hsv//eng)
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