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Photosensitivity of boron-codoped PECVD films in application to grating assisted WDM devices

Dainese, Matteo (author)
KTH,Mikroelektronik och informationsteknik, IMIT
Wosinski, Lech (author)
KTH,Mikroelektronik och informationsteknik, IMIT
Swillo, Marcin (author)
Phoxtal Communications AB
 (creator_code:org_t)
BELLINGHAM : SPIE-INT SOC OPTICAL ENGINEERING, 2004
2004
English.
In: INTEGRATED OPTICS AND PHOTONIC INTEGRATED CIRCUITS. - BELLINGHAM : SPIE-INT SOC OPTICAL ENGINEERING. - 0819453749 ; , s. 191-198
  • Conference paper (peer-reviewed)
Abstract Subject headings
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  • UV sensitivity of B-Ge codoped cores in PECVD silica waveguides has been investigated. Photoinduced refractive index changes have been introduced by KrF excimer laser irradiation at 248 rim, without any presensitization method. The effects of B codoping of Ge doped silica have been examined. It has been shown that B addition mildly increases glass network disorder, by broadening the O bridging angle distribution as from FTIR measurements, but on the other hand it does not produce point defects which may contribute to the absorption band at 5eV already generated by the presence of Ge doping. The fabricated channel waveguides show low optical loss even without high temperature annealing. Strong Bragg gratings imprinted into these waveguides confirm that in non thermally annealed Ge doped PECVD silica glass, where a small absorption band still exist at 5eV, B codoping supplies sufficient photosensitivity amplification to make hydrogen loading unnecessary.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Keyword

photosensitivity
Bragg gratings
silica-on-silicon technology
planar lightwave circuit (PLC)
boron codoping
PECVD fabrication
Electrical engineering, electronics and photonics
Elektroteknik, elektronik och fotonik

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ref (subject category)
kon (subject category)

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Dainese, Matteo
Wosinski, Lech
Swillo, Marcin
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ENGINEERING AND TECHNOLOGY
ENGINEERING AND ...
and Electrical Engin ...
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INTEGRATED OPTIC ...
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Royal Institute of Technology

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