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Effect of temperatu...
Effect of temperature treatment on Au/Pd Schottky contacts to 4H-SiC
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- Kassamakova, L (author)
- Bulgarian Acad Sci, Inst Appl Phys, BG-4000 Plovdiv, Bulgaria Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden
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- Kakanakov, R (author)
- Bulgarian Acad Sci, Inst Appl Phys, BG-4000 Plovdiv, Bulgaria Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden
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- Yakimova, Rositsa (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
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- Kakanakova-Georgieva, Anelia, 1970- (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
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- Syväjärvi, Mikael (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
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- Wilzén, Lars (author)
- Linköpings universitet,Tekniska högskolan,Institutionen för fysik, kemi och biologi
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- Janzén, Erik (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
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(creator_code:org_t)
- 2002
- 2002
- English.
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In: Materials Science Forum, Vols. 389-393. ; , s. 929-932
- Related links:
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https://urn.kb.se/re...
Abstract
Subject headings
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- Au/Pd/SiC Schottky baffler contacts have been formed on n-type 4H-SiC grown by sublimation epitaxy. The effect of annealing temperature on the electrical properties of these contacts was studied using IN and C-V measurements. The barrier height was found to increase slightly from 1.14 eV for as-deposited contacts to 1.2 eV after annealing at 500 degreesC, while the more pronounced effect was observed with decrease of the ideality factor, Auger analysis was used to study the metallurgy of the annealed contacts. Strong diffusion between Au and Pd was established after 500 degreesC anneal, while the Pd/SiC interface remained almost steep, The electrical properties of annealed contacts have been study during the thermal treatment at temperatures up to 350 degreesC and prolonged ageing at 300 degreesC and 400 degreesC in nitrogen.
Keyword
- ageing
- barrier height
- Schottky contacts
- temperature treatment
- TECHNOLOGY
- TEKNIKVETENSKAP
Publication and Content Type
- ref (subject category)
- kon (subject category)
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