Search: onr:"swepub:oai:DiVA.org:liu-87957" >
Broadband antirefle...
Broadband antireflection silicon carbide surface by self-assembled nanopatterned reactive-ion etching
-
- Ou, Yiyu (author)
- Technical University of Denmark, Lyngby, Denmark
-
- Aijaz, Imran (author)
- Technical University of Denmark, Lyngby, Denmark
-
- Jokubavicius, Valdas (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
-
show more...
-
- Yakimova, Rositsa (author)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
-
- Syväjärvi, Mikael (author)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
-
- Ou, Haiyan (author)
- Technical University of Denmark, Lyngby, Denmark
-
show less...
-
(creator_code:org_t)
- Optical Society of America, 2013
- 2013
- English.
-
In: Optical Materials Express. - : Optical Society of America. - 2159-3930. ; 3:1, s. 86-94
- Related links:
-
https://urn.kb.se/re...
-
show more...
-
https://doi.org/10.1...
-
show less...
Abstract
Subject headings
Close
- An approach of fabricating pseudoperiodic antireflective subwavelength structures on silicon carbide by using self-assembled Au nanopatterns as etching mask is demonstrated. The nanopatterning process is more time-efficiency than the e-beam lithography or nanoimprint lithography process. The influences of the reactive-ion etching conditions and deposited Au film thickness to the subwavelength structure profile and its corresponding surface reflectance have been systematically investigated. Under the optimal experimental conditions, the average reflectance of the silicon carbide in the range of 390-784 nm is dramatically suppressed from 21.0 % to 1.9 % after introducing the pseudoperiodic nanostructures. A luminescence enhancement of 226 % was achieved at an emission angle of 20 degrees on the fluorescent silicon carbide. Meanwhile, the angle-resolved photoluminescence study presents a considerable omnidirectional luminescence enhancement.
Keyword
- TECHNOLOGY
- TEKNIKVETENSKAP
Publication and Content Type
- ref (subject category)
- art (subject category)
Find in a library
To the university's database