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IC compatible MEMS technologies
- Grenier, K (author)
- Mazenq, L (author)
- Duboc, D (author)
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- Bouchriha, F (author)
- Cocetti, F (author)
- Berntgen, J (author)
- Rabe, WJ (author)
- Sonmez, E (author)
- Abele, Peter (author)
- Schumacher, H (author)
- Plana, R (author)
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- (creator_code:org_t)
- 2005
- 2005
- English.
- In: 35th European Microwave Conference (EuMC).
- Conference paper (peer-reviewed)
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- kon (subject category)
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- Grenier, K
- Mazenq, L
- Duboc, D
- Bouchriha, F
- Cocetti, F
- Öjefors, Erik
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- Lindberg, Peter
- Rydberg, Anders
- Berntgen, J
- Rabe, WJ
- Sonmez, E
- Abele, Peter
- Schumacher, H
- Plana, R
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- 35th European Mi ...
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- Uppsala University
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