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Processing and eval...
Processing and evaluation of metal gate/high-k/Si capacitors incorporating Al, Ni, TiN, and Mo as metal gate, and ZrO2 and HfO2 as high-k dielectric
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- Abermann, S. (författare)
- Institute for Solid State Electronics, Vienna University of Technology
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- Efavi, J. K. (författare)
- Advanced Microelectronic Center, Aachen
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- Sjöblom, Gustaf (författare)
- Uppsala universitet,Fasta tillståndets elektronik
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- Lemme, M. C. (författare)
- Advanced Microelectronic Center, Aachen
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- Olsson, Jörgen, 1966- (författare)
- Uppsala universitet,Fasta tillståndets elektronik
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- Bertagnolli, E. (författare)
- Institute for Solid State Electronics, Vienna University of Technology
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(creator_code:org_t)
- Elsevier BV, 2007
- 2007
- Engelska.
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Ingår i: Microelectronic Engineering. - : Elsevier BV. - 0167-9317 .- 1873-5568. ; 84:5-8, s. 1635-1638
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- We evaluate various metal gate/high-k/Si capacitors by their resulting electrical characteristics. Therefore, we process MOS gate stacks incorporating aluminium (Al), nickel (Ni), titanium-nitride (TiN), and molybdenum (Mo) as the gate material, and metal organic chemical vapour deposited (MOCVD) ZrO2 and HfO2 as the gate dielectric, respectively. The influence of the processing sequence - especially of the thermal annealing treatment - on the electrical characteristics of the various gate stacks is being investigated. Whereas post metallization annealing in forming gas atmosphere improves capacitance-voltage behaviour (due to reduced interface-, and oxide charge density), current-voltage characteristics degrade due to a higher leakage current after thermal treatment at higher temperatures. The Flatband-voltage values for the TiN-, Mo-, and Ni-capacitors indicate mid-gap pinning of the metal gates, however, Ni seems to be thermally unstable on ZrO2, at least within the process scheme we applied.
Nyckelord
- metal gate
- high-kappa
- ZrO2
- HfO2
- MOCVD
- processing
- TECHNOLOGY
- TEKNIKVETENSKAP
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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