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High-rate depositio...
High-rate deposition of amorphous and nanocomposite Ti-Si-C multifunctional coatings
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- Lauridsen, Jonas (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Eklund, Per (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Joelsson, T. (author)
- Impact Coatings AB
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- Ljungcrantz, H. (author)
- Impact Coatings AB
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- Öberg, Å. (author)
- ABB Corporate Research
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- Lewin, Erik (author)
- Uppsala universitet,Oorganisk kemi,Uppsala University, Sweden
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- Jansson, Ulf (author)
- Uppsala universitet,Oorganisk kemi,Uppsala University, Sweden
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- Beckers, Manfred (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Högberg, Hans (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Hultman, Lars (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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(creator_code:org_t)
- Elsevier BV, 2010
- 2010
- English.
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In: Surface & Coatings Technology. - : Elsevier BV. - 0257-8972 .- 1879-3347. ; 205:2, s. 299-305
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Abstract
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- Amorphous (a) and nanocomposite Ti-Si-C coatings were deposited at rates up to 16 mu m/h by direct current magnetron sputtering from a Ti3SiC2 compound target, using an industrial pilot-plant system, onto high-speed steel. Si, and SiO2 substrates as well as NI-plated Cu cylinders, kept at a temperature of 200 or 270 degrees C. Electron microscopy, X-ray photoelectron spectroscopy, and X-ray diffraction analyses showed that TiC/a-C/a-SiC nanocomposites were formed consisting of textured TIC nanocrystallites (nc) embedded in a matrix of a-C and a-SiC. Elastic recoil detection analysis showed that coatings deposited at a target-to-substrate distance of 2 cm and an Ar pressure of 10 mTorr have a composition close to that of the Ti3SiC2 compound target, as explained by ballistic transport of the species Increased target-to-substrate distance from 2 cm to 8 cm resulted in a higher carbon-to-titanium ratio in the coatings than for the Ti3SiC2 compound target, due to different gas-phase scattering properties between the sputtered species The coating microstructure could be modified from nanocrystalline to predominantly amorphous by changing the pressure and target-to-substrate conditions to 4 mTorr and 2 cm, respectively. A decreased pressure from 10 mTorr to 4 or 2 mTorr at a target-to-substrate distance of 2 cm decreased the deposition rate up to a factor of similar to 7 as explained by resputtering and an increase in the plasma sheath thickness. The coatings exhibited electrical resistivity in the range 160-800 mu Omega cm, contact resistance down to 08 m Omega at a contact force of 40 N, and nanoindentation hardness in the range of 6-38 GPa.
Subject headings
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- Nanocomposites
- TiSiC coatings
- Pilot plant
- Magnetron sputtering
- Resistivity
- Electron microscopy
- Inorganic chemistry
- Oorganisk kemi
- Kemi med inriktning mot oorganisk kemi
- Chemistry with specialization in Inorganic Chemistry
- Physics
Publication and Content Type
- ref (subject category)
- art (subject category)
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- By the author/editor
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Lauridsen, Jonas
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Eklund, Per
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Joelsson, T.
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Ljungcrantz, H.
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Öberg, Å.
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Lewin, Erik
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show more...
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Jansson, Ulf
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Beckers, Manfred
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Högberg, Hans
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Hultman, Lars
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- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Chemical Science ...
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and Inorganic Chemis ...
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
- Articles in the publication
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Surface & Coatin ...
- By the university
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Uppsala University
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Linköping University