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Removal of RSE induced damages in silicon
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- Blom, Hans-Olof (author)
- Uppsala universitet,Fasta tillståndets elektronik
- Norström, H (author)
- Östling, M (author)
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- Wiklund, P (author)
- Buchta, R (author)
- Petersson, CS (author)
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- (creator_code:org_t)
- 1986
- 1986
- English.
- In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - 0734-2101 .- 1520-8559. ; 4:3, s. 752-
- Journal article (peer-reviewed)
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- Blom, Hans-Olof
- Norström, H
- Östling, M
- Wiklund, P
- Buchta, R
- Petersson, CS
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- Uppsala University
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