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Mechanical properties and thermal stability of reactively sputtered multi-principal-metal Hf-Ta-Ti-V-Zr nitrides

Kirnbauer, A. (author)
TU Wien, Inst Mat Sci & Technol, Getreidemarkt 9, A-1060 Vienna, Austria.
Kretschmer, A. (author)
TU Wien, Inst Mat Sci & Technol, Getreidemarkt 9, A-1060 Vienna, Austria.
Koller, C. M. (author)
TU Wien, Inst Mat Sci & Technol, Getreidemarkt 9, A-1060 Vienna, Austria.
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Wojcik, T. (author)
TU Wien, Inst Mat Sci & Technol, Getreidemarkt 9, A-1060 Vienna, Austria.
Paneta, Valentina (author)
Uppsala universitet,Tillämpad kärnfysik
Hans, M. (author)
Rhein Westfal TH Aachen, Mat Chem, Kopernikusstr 10, D-52074 Aachen, Germany.
Schneider, J. M. (author)
Rhein Westfal TH Aachen, Mat Chem, Kopernikusstr 10, D-52074 Aachen, Germany.
Polcik, P. (author)
Plansee Composite Mat GmbH, Siebenburgerstr 23, D-86983 Lechbruck, Germany.
Mayrhofer, P. H. (author)
TU Wien, Inst Mat Sci & Technol, Getreidemarkt 9, A-1060 Vienna, Austria.
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TU Wien, Inst Mat Sci & Technol, Getreidemarkt 9, A-1060 Vienna, Austria Tillämpad kärnfysik (creator_code:org_t)
ELSEVIER SCIENCE SA, 2020
2020
English.
In: Surface & Coatings Technology. - : ELSEVIER SCIENCE SA. - 0257-8972 .- 1879-3347. ; 389
  • Journal article (peer-reviewed)
Abstract Subject headings
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  • Crystalline (Hf,Ta,Ti,V,Zr)N nitride thin films, with a high-entropy metal-sublattice, were synthesized at 440 degrees C by reactive magnetron sputtering using an equimolar Hf-Ta-Ti-V-Zr-compound target. The coatings are single-phase fcc structured mono-nitrides for N-2/(Ar + N-2) flow-rate-ratios (f(N2)) between 30 and 45%. For higher f(N2) a small fraction of a second phase (next to the fcc matrix) can be detected by X-ray diffraction (XRD) and selected area electron diffraction (SAED). All coatings studied (prepared with f(N2) between 30 and 60%) show similar chemical compositions and hardness (H) values between 30.0 and 34.0 GPa with indentation moduli of similar to 460 GPa. Atom probe tomography (APT) indicates a homogenous distribution of all elements within our fcc-(Hf,Ta,Ti,V,Zr)N even after vacuum-annealing at 1300 degrees C. While H decreased from 32.5 to 28.1 GPa by this annealing treatment, the coating is still single-phase fcc structured with a defect density (expressed by XRD and SAED features, transmission electron microscopy contrast, and grain sizes) comparable to the as-deposited state. Only after vacuum-annealing at 1500 degrees C, XRD and APT reveal the formation of hexagonal structured (Ta,V)(2)N. The onset of nitrogen-loss - detected by thermogravimetric analysis - is similar to 1350 degrees C. Based on our results we can conclude that the sluggish diffusion within our fcc-(Hf,Ta,Ti,V,Zr)N warrants the single-phase fcc structure up to 1300 degrees C, although ab initio based calculations would suggest the lower-entropy products [fcc-(Hf,Zr)N, fcc-(Ta,V)N, and fcc-TiN] and [fcc-(Hf,Zr)N and fcc-(Ta,Ti,V)N] to be energetically more stable up to 1302 K.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Materialteknik -- Bearbetnings-, yt- och fogningsteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Materials Engineering -- Manufacturing, Surface and Joining Technology (hsv//eng)

Keyword

Chemically complex alloys
High-entropy alloys (HEAs)
High-entropy nitrides
Multi-principal element nitrides
Magnetron sputtering
Thermal stability

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ref (subject category)
art (subject category)

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