Sökning: onr:"swepub:oai:DiVA.org:uu-511889" >
Low temperature epi...
Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering
-
- Gangaprasad Rao, Smita (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Department of Physics, Chemistry, and Biology (IFM), Thin Film Physics Division, Linköping University 1 , Linköping 58183, Sweden
-
- Illgner, Pascal Manuel (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Department of Physics, Chemistry, and Biology (IFM), Thin Film Physics Division, Linköping University 1 , Linköping 58183, Sweden
-
- Boyd, Robert (författare)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten,Department of Physics, Chemistry, and Biology (IFM), Plasma and Coatings Physics Division, Linköping University 2 , Linköping 58183, Sweden
-
visa fler...
-
- Nagy, Gyula (författare)
- Uppsala universitet,Tillämpad kärnfysik,Uppsala Univ, Sweden,Department of Physics and Astronomy, Uppsala University 3 , Lägerhyddsvägen 1, Uppsala S-75120, Sweden
-
- Djemia, Philippe (författare)
- Univ Sorbonne Paris Nord, Alliance Sorbonne Paris Cite, Lab Sci Procedes & Mat, UPR CNRS 3407, F-93430 Villetaneuse, France.,Université Sorbonne Paris Nord, Alliance Sorbonne Paris Cité, Laboratoire des Sciences des Procédés et des Matériaux 4 , UPR 3407 CNRS, Villetaneuse F-93430, France
-
- Primetzhofer, Daniel (författare)
- Uppsala universitet,Tillämpad kärnfysik,Uppsala Univ, Sweden,Department of Physics and Astronomy, Uppsala University 3 , Lägerhyddsvägen 1, Uppsala S-75120, Sweden
-
- Petrov, Ivan (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Univ Illinois, IL 61801 USA,Department of Physics, Chemistry, and Biology (IFM), Thin Film Physics Division, Linköping University 1 , Linköping 58183, Sweden;Materials Research Laboratory and Department of Materials Science, University of Illinois 5 , Urbana, Illinois 61801
-
- Le Febvrier, Arnaud (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Department of Physics, Chemistry, and Biology (IFM), Thin Film Physics Division, Linköping University 1 , Linköping 58183, Sweden
-
- Eklund, Per (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Department of Physics, Chemistry, and Biology (IFM), Thin Film Physics Division, Linköping University 1 , Linköping 58183, Sweden
-
visa färre...
-
(creator_code:org_t)
- American Institute of Physics (AIP), 2023
- 2023
- Engelska.
-
Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Institute of Physics (AIP). - 0734-2101 .- 1520-8559. ; 41:5
- Relaterad länk:
-
https://doi.org/10.1...
-
visa fler...
-
https://uu.diva-port... (primary) (Raw object)
-
https://liu.diva-por... (primary) (Raw object)
-
https://urn.kb.se/re...
-
https://doi.org/10.1...
-
https://urn.kb.se/re...
-
https://urn.kb.se/re...
-
visa färre...
Abstract
Ämnesord
Stäng
- Low-temperature epitaxial growth of multicomponent alloy-based thin films remains an outstanding challenge in materials science and is important for established fundamental properties of these complex materials. Here, Cantor nitride (CrMnFeCoNi)N thin films were epitaxially grown on MgO(100) substrates at low deposition temperature by magnetic-field-assisted dc-magnetron sputtering, a technique where a magnetic field is applied to steer the dense plasma to the substrate thereby influencing the flux of Ar-ions bombarding the film during growth. Without ion bombardment, the film displayed textured growth. As the ion flux was increased, the films exhibited epitaxial growth. The epitaxial relationship between film and substrate was found to be cube on cube (001)film parallel to(001)MgO, [100]film parallel to[100]MgO. The epitaxy was retained up to a thickness of approximately similar to 100 nm after which the growth becomes textured with a 002 out-of-plane orientation. The elastic constants determined by Brillouin inelastic light scattering were found to be C-11 = 320 GPa, C-12 = 125 GPa, and C-44 = 66 GPa, from which the polycrystalline Young's modulus was calculated as 204 GPa and Poisson's ratio = 0.32, whereas available elastic properties still remained very scarce.
Ämnesord
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
- NATURVETENSKAP -- Kemi -- Materialkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Materials Chemistry (hsv//eng)
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
Hitta via bibliotek
Till lärosätets databas