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Composition, structure, and dielectric tunability of epitaxial SrTiO3 thin films grown by radio frequency magnetron sputtering
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- Wang, X (author)
- Uppsala universitet
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- Helmersson, U (author)
- Uppsala universitet
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- Madsen, LD (author)
- Uppsala universitet
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- AMER INST PHYSICS, 1999
- 1999
- English.
- In: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS. - : AMER INST PHYSICS. - 0734-2101. ; 17:2, s. 564-570
- Journal article (other academic/artistic)
Abstract
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- Epitaxial (001) oriented SrTiO3 films have been deposited on LaAlO3(001) substrates by off-axis radio frequency magnetron sputtering in Ar:O-2 gas mixtures at substrate temperatures ranging from 650 to 850 degrees C. For the deposition conditions used, st
Keyword
- INTERDIGITAL CAPACITORS; STRONTIUM-TITANATE; SIMULATION; DEPOSITION; LAALO3; TEMPERATURES
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- vet (subject category)
- art (subject category)
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- Wang, X
- Helmersson, U
- Madsen, LD
- Ivanov, IP
- Munger, P
- Rudner, S
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- Hjorvarsson, B
- Sundgren, JE
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