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- Amirfeiz, Petra,1973Chalmers tekniska högskola,Chalmers University of Technology (author)
Applications of plasma assisted wafer bonding
- Article/chapterEnglish2002
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- 2002
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- LIBRIS-ID:oai:research.chalmers.se:1a10b8e4-0c2d-433b-b231-debffb1946fe
- https://research.chalmers.se/publication/16203URI
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- Language:English
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- Sanz-Velasco, Anke,1971Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)ankesanz (author)
- Bring, Martin,1977Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)marbr (author)
- Bengtsson, Stefan,1961Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)stefanb (author)
- Chalmers tekniska högskola (creator_code:org_t)
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- In:Proceedings of the Workshop on wafer bonding, Barcelona, Spain
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