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Micromachining of S...
Micromachining of Silicon for Thermal and Position-Sensitive Nuclear-Detector Applications
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Backlund, Y. (author)
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Coron, N. J. (author)
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- Delsing, Per, 1959 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Jonson, Björn, 1941 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Lindroos, Mats, 1961 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Nyman, Göran Hugo, 1943 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Ravn, H. (author)
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Riisager, K. (author)
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Stroke, H. H. (author)
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(creator_code:org_t)
- Elsevier BV, 1989
- 1989
- English.
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In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. - : Elsevier BV. - 0168-9002. ; 279:3, s. 555-559
- Related links:
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http://dx.doi.org/10...
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https://research.cha...
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https://doi.org/10.1...
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Abstract
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- As part of a programme aiming at the development of small nuclear radiation detectors, for example thermal detectors and position sensitive mosaic structures of surface barrier type, a technique for micromachining the detector bodies in silicon has been developed. The technique is based on an anisotropic etching property of a solution, mainly consisting of KOH. The etch rate is strongly orientation dependent with a speed in the 〈100〉 direction about 400 times faster than in the 〈111〉 direction. The major steps in the etching procedure are described and some examples of deep etching in Si are shown.
Subject headings
- NATURVETENSKAP -- Fysik -- Subatomär fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Subatomic Physics (hsv//eng)
Publication and Content Type
- art (subject category)
- ref (subject category)
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- By the author/editor
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Backlund, Y.
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Coron, N. J.
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Delsing, Per, 19 ...
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Jonson, Björn, 1 ...
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Lindroos, Mats, ...
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Nyman, Göran Hug ...
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show more...
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Ravn, H.
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Riisager, K.
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Stroke, H. H.
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show less...
- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
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and Subatomic Physic ...
- Articles in the publication
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Nuclear Instrume ...
- By the university
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Chalmers University of Technology