WFRF:(Pettersson Håkan 1962 )
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Metal-assisted chemical etching of Si for fabrication of nanoimprint stamps
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- Anokhina, Ksenia (author)
- Avd. f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden,Nanovetenskap
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- Graczyk, Mariousz (author)
- Avd. f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden,Nanometerkonsortiet
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- Kvennefors, Anders (author)
- Avd. f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden,Nanometerkonsortiet
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- Avd f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden Nanovetenskap (creator_code:org_t)
- 2011
- 2011
- English.
- Conference paper (peer-reviewed)
Subject headings
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Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
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- kon (subject category)
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- NATURAL SCIENCES
- NATURAL SCIENCES
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- Halmstad University
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