MEMS Sensor for< emphasis emphasistype

MEMS Sensor for< emphasis emphasistype=

Here, we present a MEMS atomic force microscope sensor for use inside a transmission electron microscope ITEM). This enables direct in situ TEM force measurements in the nanonewton range and thus mechanical characterization of nanosized structures. The main design challenges of the system and sensor are to reach a high sensitivity and to make a compact design that allows the sensor to be fitted in the narrow dimensions of the pole gap inside the TEM. In order to miniaturize the sensing device, an integrated detection with piezoresistive elements arranged in a full Wheatstone bridge was used. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We also present in situ TEM force measurements on nanotubes, which demonstrate the ability to measure spring constants of nanoscale systems

Karlen, D.Chalmers University of Technology, Gothenburg (författare)
Rusu, C.Imego Institute, Gothenburg (författare)
Svensson, Krister,1969-Karlstads universitet,Avdelningen för fysik och elektroteknik,Materialfysik(Swepub:kau)ksvensso (författare)
Olin, H.Mid Sweden University, Sundsvall (författare)
Enoksson, P.Chalmers University of Technology, Gothenburg (författare)
Chalmers University of Technology, GothenburgImego Institute, Gothenburg (creator_code:org_t)

Ingår i:Microelectromechanical Systems, Journal ofPhiladelphia : Institute of Physics (IOP)17:2, s. 328-3331057-7157

Av författaren/redakt...: Nafari, A.; Karlen, D.; Rusu, C.; Svensson, Kriste ...; Olin, H.; Enoksson, P.

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