WFRF:(Peters Stefan)
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- Kenanoglu, Ali (author)
New large area PECVD-system for a-SiN:H deposition at 13.56 MHz
- Article/chapterEnglish2003
Publisher, publication year, extent ...
- 2003
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:kau-27938
- https://urn.kb.se/resolve?urn=urn:nbn:se:kau:diva-27938URI
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- Language:English
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- SwePubSwePub
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- NATURVETENSKAP Fysik Den kondenserade materiens fysik hsv//swe
- NATURAL SCIENCES Physical Sciences Condensed Matter Physics hsv//eng
- Physics
- Fysik
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- Borchert, Dietmar (author)
- Ballif, Christoph (author)
- Peters, Stefan (author)
- Zerres, Thomas (author)
- Rinio, Markus (author)
- Huljic, D. M. (author)
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- Karlstad University
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