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Process considerati...
Process considerations for layer-by-layer 3D patterning of silicon, using ion implantation, silicon deposition, and selective silicon etching
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- Gylfason, Kristinn B., 1978- (författare)
- KTH,Mikrosystemteknik
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- Fischer, Andreas C. (författare)
- KTH,Mikrosystemteknik
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- Gunnar Malm, B. Gunnar (författare)
- KTH,Integrerade komponenter och kretsar
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- Radamson, Henry H. (författare)
- KTH,Integrerade komponenter och kretsar
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- Belova, Lyubov M. (författare)
- KTH,Teknisk materialfysik
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- Niklaus, Frank (författare)
- KTH,Mikrosystemteknik
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(creator_code:org_t)
- American Vacuum Society, 2012
- 2012
- Engelska.
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Ingår i: Journal of Vacuum Science & Technology B. - : American Vacuum Society. - 1071-1023 .- 1520-8567. ; 30:6, s. 06FF05-
- Relaterad länk:
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http://dx.doi.org/10...
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https://kth.diva-por... (primary) (Raw object)
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http://kth.diva-port...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- The authors study suitable process parameters, and the resulting pattern formation, in additive layer-by-layer fabrication of arbitrarily shaped three-dimensional (3D) silicon (Si) micro- and nanostructures. The layer-by-layer fabrication process investigated is based on alternating steps of chemical vapor deposition of Si and local implantation of gallium ions by focused ion beam writing. In a final step, the defined 3D structures are formed by etching the Si in potassium hydroxide, where the ion implantation provides the etching selectivity.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- chemical vapour deposition
- elemental semiconductors
- etching
- focused ion beam technology
- gallium
- ion implantation
- nanofabrication
- nanopatterning
- nanostructured materials
- semiconductor doping
- semiconductor growth
- silicon
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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