Layer-by-layer 3D printing of Si micro- and nanostructures by Si deposition, ion implantation and selective Si etching

QC 20130110
In this paper we report a method for layer-by-layer printing of three-dimensional (3D) silicon (Si) micro- and nanostructures. This fabrication method is based on a sequence of alternating steps of chemical vapor deposition of Si and local implantation of gallium (Ga+) ions by focused ion beam (FIB) writing. The defined 3D structures are formed in a final step by selectively wet etching the non-implanted Si in potassium hydroxide (KOH). We demonstrate the viability of the method by fabricating 2 and 3-layer 3D Si structures, including suspended beams and patterned lines with dimensions on the nm-scale.

Gylfason, Kristinn B.,1978-KTH,Mikrosystemteknik(Swepub:kth)u1v3y7u7 (author)
Belova, Lyubov M. (author)
Malm, Gunnar B.KTH,Integrerade komponenter och kretsar(Swepub:kth)u13lag9j (author)
Radamson, Henry H.KTH,Integrerade komponenter och kretsar(Swepub:kth)u1g2cqgr (author)
Kolahdouz, M.KTH,Integrerade komponenter och kretsar(Swepub:kth)u1cet9aw (author)
Rikers, Y. G. M. (author)
Stemme, GöranKTH,Mikrosystemteknik(Swepub:kth)u1oyebfq (author)
Niklaus, FrankKTH,Mikrosystemteknik(Swepub:kth)u1bcu8r2 (author)
KTHMikrosystemteknik (creator_code:org_t)

In:12th IEEE Conference on Nanotechnology (IEEE-NANO), 2012: IEEE conference proceedings, s. 1-49781467321983

By the author/editor: Fischer, Andreas ...; Gylfason, Kristi ...; Belova, Lyubov M ...; Malm, Gunnar B.; Radamson, Henry ...; Kolahdouz, M.; show more...; Rikers, Y. G. M.; Stemme, Göran; Niklaus, Frank; show less...

About the subject

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Electrical Engin ...; and Other Electrical ...

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